Introduction: ASML focuses on developing innovative solutions to maximize the production of extreme ultraviolet (EUV) light by harnessing high-power source lasers. The primary goal of this internship is to investigate the leakage mechanism of EOM (Electro-Optical Modulator). To achieve this, you will perform tests on different EOM parameters such as incident angle, input polarization, high-voltage setting, etc. and measure the resulting transmission and leakage through an EOM. The final objective is to establish a clear understanding of the EOM performance. This project offers a valuable and hands-on learning experience for an intern.